| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processor capable of separating and recovering a treatment solvent in the case of treating a substrate with the first treatment solvent and the second treatment solvent in order. SOLUTION: The spin processor is provided with a rotary provided rotatably within a cup body 16, the first treatment solvent nozzle 26 for feeding the first treatment solvent and the second treatment solvent nozzle 27 for feeding the second treatment solvent toward the substrate 11, a main discharging pipe 21 the one end of which is connected to the bottom of the cup body and which has the first branch pipe 22 and the second branch pipe 23 branched from the other end, the first jetting nozzle 32 for jetting a fluid for allowing the first treatment solvent to flow into the first branch pipe and preventing the first treatment solvent from flowing into the second branch pipe when the first treatment solvent is discharged from the cup body to the main discharging pipe, and the second jetting nozzle 33 for jetting the fluid for allowing the second treatment solvent to flow into the second branch pipe and preventing the second treatment solvent from flowing into the first branch pipe when the second treatment solvent is discharged from the cup body to the main discharging pipe.
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