摘要 |
PROBLEM TO BE SOLVED: To provide a beam transportation system increasing operability and reliability by automatically adjusting the position of a beam. SOLUTION: This beam transportation system is composed of at least one beam slit section 21 fitted to a vacuum duct 1 and having slits 211, 212 provided in the horizontal direction and slits 213, 214 provided in the vertical direction, at least one horizontal direction steering electromagnet 3, and at least one vertical direction steering electromagnet 4. The beam transportation system is provided with a current detecting means 11 detecting the current flowing in a slit when a beam collides with one of the slits 211, 212, 213, 214 and a control means 10 controlling the excitation quantities of the horizontal direction and vertical direction steering electromagnets 3, 4 based on the detected result of the current detecting means 11.
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