发明名称 Illumination optical system and exposure apparatus having the same
摘要 An illumination optical system includes a luminous intensity distribution converting optical system for converting an illuminance distribution of a light source image into a luminous intensity distribution upon a predetermined plane, a light transmitting element having its light entrance surface disposed substantially in coincidence with the predetermined plane, and a light collecting optical system for defining an illumination region upon a surface to be illuminated, by use of light from the light transmitting element.
申请公布号 US6857764(B2) 申请公布日期 2005.02.22
申请号 US19990342210 申请日期 1999.06.29
申请人 CANON KABUSHIKI KAISHA 发明人 KOHNO MICHIO
分类号 G02B5/10;G02B17/08;G03F7/20;H01L21/027;(IPC1-7):F21V13/12;G02B6/32 主分类号 G02B5/10
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