PROCESS FOR FABRICATING GE:HG INFRARED DETECTOR ARRAYS AND RESULTING ARTICLE OF MANUFACTURE

摘要

An infrared detector array is fabricated by alloying a slice of mercury doped germanium to a degenerate germanium substrate. After being lapped to the desired thickness, the slice is etched through to the substrate to form individual detector bars using a metal mask which is then partially removed to form a gold contact strip on each bar. Output conductors are formed by patterning copper films thermocompression bonded to high temperature plastics, gold plating the conductors, and connecting the gold plated conductors to the gold contact strips by gold jumper wires thermocompression bonded to the conductors and to the contact strips.