| 发明名称 |
CRYOPUMP REGENERATION METHOD AND APPARATUS |
| 摘要 |
A cryopump is regenerated by means of an ejector pump (70) which draws gas from the cryopump as the pump is warmed. The ejector (70) is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation. |
| 申请公布号 |
WO8605240(A1) |
申请公布日期 |
1986.09.12 |
| 申请号 |
WO1986US00462 |
申请日期 |
1986.03.03 |
| 申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
ANDEEN, BRUCE, R.;PANDORF, ROBERT, C. |
| 分类号 |
F04B37/08;(IPC1-7):F04B37/08 |
主分类号 |
F04B37/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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