| 摘要 |
PROBLEM TO BE SOLVED: To make the in-plane distribution of the surface shape of a sample acqurable in a short time and with high accuracy, by hinding data on the dependence of a radiating angle from the sample on the intensity of X-rays scattered from the sample on the basis of a detected intensity distribution. SOLUTION: One X-ray-intensity-distribution recording medium 16 is moved in the up-and-down direction with reference to a slit 17, the medium 16 is divided into a plurality of regions 131 to 139, and the dependence of the outgoing angleαof scattered X-rays 7 from a plurality of measuring points 121 to 129 can be recorded on one X-ray-intensity-distribution recording medium 16. After that, a light sensing operation by the scattered X-rays from all the measuring points 121 to 129 is performed, and the whole face of the X-ray-intensity- distribution recording medium 16 is read out at a time. Thereby, although the plurality of measuring points are measured, only one readout operation is sufficient, and the measuring time can be shortened sharply. Since the time can be shortened, it does not take much time to measure the plurality of measuring points on a sample as compared with conventional cases, and the in-plane distribution of information on the roughness of a surface on the sample can be obtained.
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