发明名称 |
Inspection device for transparent substrate end surface and inspection method therefor |
摘要 |
An inspection apparatus for inspecting an end face of a transparent substrate and an inspection method for inspecting an end face of a transparent substrate according to the present invention are capable of reliably and accurately detecting defects at the end face of the transparent substrate. When a display panel substrate 10 which is a transparent substrate to placed on a rotating table 21 , a light is intermittently emitted from an end-face illuminating unit 39 arranged opposite to the end face of the display panel substrate 10 . The light emitted along the surface of the substrate 10 is reflected from a lower reflecting mirror 42 toward the end face of the transparent substrate 10 . The end face and an adjacent portion thereof are imaged by a CCD camera 36 . Defects at the end face of the display panel substrate 10 are detected based on an image density of each pixel in the obtained image data.
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申请公布号 |
US7289201(B2) |
申请公布日期 |
2007.10.30 |
申请号 |
US20040547827 |
申请日期 |
2004.03.03 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
MATSUMOTO JUNICHI |
分类号 |
G01N21/00;G01N21/95;G01N21/958;G02F1/13 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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