FremgangsmÕte for Õ fremstille en piezoelektrisk resonator

摘要

The invention provides a method of manufacturing a resonance element, comprising the steps of: preparing a multilayered body comprising a plurality of piezoelectric layers and a plurality of inner electrodes laminated to each other; forming an insulating film on one surface of said multilayered body at exposed portions of said inner electrodes, said insulating film having a plurality of openings constituting parallel rows which is parallel to the laminating direction of said multilayered body; forming an outer electrode on substantially the entire surface on which said insulating film is formed; forming a plurality of grooves on the surface on which said outer electrode was formed and cutting said multilayered body parallel to said grooves; wherein a group of said openings in one of said rows are disposed on every alternate exposed portion of said internal electrodes, and the other group of said openings in the other row adjacent to said one of said rows are disposed on every different alternate exposed portion of said internal electrodes; said one of said rows and the other row adjacent to said one of said rows are separated from each other with a predetermined distance; and said groove is formed between said one of said rows and the other row adjacent to said one of said rows.