| 摘要 |
PROBLEM TO BE SOLVED: To eliminate unstableness of ion-beam current that occurs when a target ion-beam current is set up at an especially low value. SOLUTION: This ion source device is equipped with a slit adjusting plate 6 mounted on an arc chamber 2 for varying the opening area of a slit 5, a motor 8 for driving the slit adjusting plate 6, and a controller 13 for controlling the motor 8 based on the result of comparison of a measured ion-beam current Ia with a previously set-up target ion-beam current Ib.
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