| 摘要 |
PROBLEM TO BE SOLVED: To provide the optical master disk in which the depths of the pits or the grooves of the disk are made deeper as they move from the inner peripheral of a recording and reproducing region to the outer peripheral and to provide the method and the device for coating photoresist. SOLUTION: An optical master disk 4 is mounted on a turntable 3 located in a cup 1 and rotated by a motor 2. A nozzle 7 is extended to the disk 4 to coat photoresist. A flow straightening plate 5 is arranged in the cup 1 so that the plate 5 moves up and down by a driving device 6. The plate 5 is doughnut shaped and has the central opening section whose diameter is equivalent to the outer peripheral of region, in which a resist layer is exposed, or less. Air is sucked in from the central opening section by the device not shown in the figure. The air goes through between the disk 4 and the plate 5 and ejected through ducts 8, a liquid chemical receiving dish 9 and an air exhaust duct 10. At that time, the flow of air is controlled by the up and down movement of the plate 5 performed by the device 6 and the fan provided in the duct not shown in the figure. Since the air flow is controlled while a spin coating or a spin drying is conducted, the thickness of the film is precisely controlled. |
