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发明名称
TUNGSTEN CVD METHOD
摘要
申请公布号
JPH0459968(A)
申请公布日期
1992.02.26
申请号
JP19900169993
申请日期
1990.06.29
申请人
SHIYOUDENRIYOKU KOUSOKU TSUUSHIN KENKIYUUSHIYO:KK
发明人
HIRANO KIICHI;TAKEDA NOBUO
分类号
C23C16/14;C23C16/44;C23C16/52;H01L21/28;H01L21/285
主分类号
C23C16/14
代理机构
代理人
主权项
地址
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