RECIRCULATION WATER CIRCUIT FOR PROCESSING ELECTRONIC PARTS

摘要

PURPOSE:To enhance the collection efficiency of fine particles, by sequentially providing a high gradient magnetic separator, a filter and a water temp. controller to a water recirculation passage recirculated to a polishing process from the upstream side. CONSTITUTION:Washing water 1 issued from a VTR processing line is collected by a first tank 2 and a high gradient magnetic separator 11 is inserted in a route for sending water to a second tank by a pump 3. The magnetic separator 11 is constituted so as to allow a through 15 packed with a matrix 14 to reciprocally move in a uniform magnetic field formed by a magnetic pole 13. Washing water 1 is supplied to the matrix 14 present at the magnetic pole 13 to be passed therethrough and collected in the first tank 2. High pressure water is supplied to the matrix 14 issued from the magnetic pole 13 by reciprocating motion from nozzles 16, 17 to wash off the substance adhered to the matrix 14. By this method, fine particles can be removed with high efficiency.