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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH05132770(A)
申请公布日期
1993.05.28
申请号
JP19910294503
申请日期
1991.11.11
申请人
CANON INC
发明人
MUKAI YASUO;TAKAKURA HIDEO
分类号
C23C14/34;C23C14/54;C23C14/56;H01J37/34;H01L21/203;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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