| 摘要 |
PROBLEM TO BE SOLVED: To realize a mask registration method for preventing the erroneous registration of a mask. SOLUTION: When a worker sets a mask in an exposing device (S1), and inputs a mask name to a system managing device (S2), a system managing device communicates the inputted mask name to the exposing device, and transmits a collation instruction (S3). The exposing device receives the collation instruction, reads a mask name bar code printed on the set mask, and collates the read mask with the communicated mask name (S4). When both the mask names are not made coincident, the aligner transmits incoincidence communication (S5), and the system managing device operates error display(S6), mask set retry (S7), mask name re-input (S8), and re-collation instruction (S9), and the exposing device collates the mask names again (S10), and when both the mask names are made coincident, the exposing device transmits coincidence communication (S11). The system managing device receives the coincidence communication, and registers the inputted mask name (S12). |
