Ignition unit for a vacuum arc discharge evaporator

摘要

The ignition unit is intended for a vacuum arc discharge evaporator which essentially consists of a base element (3) with a target (4), an electric screen (5) around the base element, and a current supply block. The unit is characterized by the following features: a) ignition plasma is produced by means of mechanically movable ignition electrode brought into a brief contact with the target by means of a mechanism (7); b) the electric screen (5) has an elastic section which is contacted by the striker (10) of the mechanism (7); c) as a result, this elastic section briefly contacts the target circumference and performs the task of an ignition electrode.