ELECTRODE AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

摘要

An electrode and manufacturing method thereof, and array substrate and manufacturing method thereof. The electrode manufacturing method comprises: forming a ZnON material layer on a metal electrode layer (10); etching the ZnON material layer to form a microlens structure layer (11); and forming a transparent electrode layer (12) on the microlens structure layer (11). Since the ZnON material is used as the material for forming the microlens structure layer, when the microlens structure is formed by etching, a weaker alkaline or acid solution can be used to prevent the metal electrode layer from being corroded.