| 摘要 |
PURPOSE:To improve both wear resistance and magnetic characteristics by alternately laminating the 1st thin films essentially consisting of Fe and Si and the 2nd thin films consisting of a wear-resistant alloy and specifying the thicknesses equiv. to one layer of the 1st and 2nd films. CONSTITUTION:The 1st thin films essentially consisting of Fe and Si (e.g.; 6.5wt% Si-Fe) and having <=1X10<-5>lambda magnetorestriction constant and the 2nd thin films 2 consisting of an amorphous alloy (e.g.: Co-Nb-Zr) or Fe-Si-Al alloy having excellent wear resistance and <=1X10<-5>lambda are alternately formed on a substrate. These films are formed to t1, t2<1,000Angstrom and t1<2t2 when the film thicknesses equiv. to one layer of the films 1, 2 are respectively designated as t1, t2. Insulating films 3 consisting of SiO2, etc., or the films consisting of Ag, Cu, Mg, etc., which are hardly solutionizable with the films 1, 2 may be provided between the films 1 and 2 according to need. The magnetic material having the excellent magnetic characteristics and high wear resistance is obtd. according to the above-mentioned constitution. |
