发明名称 |
Method for aligning a loadport to an overhead hoist transport system |
摘要 |
A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.
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申请公布号 |
US7261508(B2) |
申请公布日期 |
2007.08.28 |
申请号 |
US20020127111 |
申请日期 |
2002.04.22 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIN LI-REN;WANG SHI-MING;CHANG CHENG-CHANG |
分类号 |
B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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地址 |
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