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发明名称
CONTROLLER FOR HIGH SPEED CUT-OFF VALVE FOR VACUUM DEVICE
摘要
申请公布号
JPH03163282(A)
申请公布日期
1991.07.15
申请号
JP19890303930
申请日期
1989.11.22
申请人
FUJITSU LTD;FUJITSU AUTOM KK
发明人
OKAMURA SHIGERU;SAITO HAJIME;TABUCHI KOJI
分类号
F16K31/06
主分类号
F16K31/06
代理机构
代理人
主权项
地址
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