| 摘要 |
PURPOSE:To provide a method of forming a low loss garnet waveguide having a rectangular cross section. CONSTITUTION:In a processing method of a waveguide formed out of a substituted garnet film, for which at least one element having an equal value is substituted for a part of constituents other than oxygen, of a magnetic garnet film shown by a general formula R3Fe5O12 or a garnet, after a ridge of the garnet having a desired height is formed, a garnet waveguide is processed by protecting the upper surface of the waveguide in a solution 6 including at least any one among phosphoric acid, hydrobromic acid, tri-n-butylphosphate, tricresyl phosphate, triphenyl phosphate, that can dissolve garnet chemically using an organic or inorganic mask material 4 that remains on the ridge. A waveguide of a rectangular cross section, having a smooth side wall, can thus be formed. |
