| 摘要 |
PURPOSE: To highly speedily and efficiently remove debris by providing a vacuum suction device having a suction nozzle at a position facing to a ablation machining part, sucking the debris generated caused on the ablation and removing them. CONSTITUTION: A vacuum suction device is provided at a position facing an ablation machining part which is irradiated with an excimer laser beam, it is installed near the machining range of an object to be machined and it is positioned at a position so that the raising velocity of a plume is minified and the debris A is sucked with a suction nozzle 1. The opening shape of the suction nozzle 1 is made suitably in the form of a cylinder, an ellipse, a rectangle or a slit, etc. Therefore, the excimer laser beam equipment without sticking the debris on the front face of the object to be machined or without reducing the energy of the following laser pulse is obtained. |
