PRODUCTION OF SILICON CARBIDE SINTERED COMPACT

摘要

PURPOSE:To produce a silicon carbide sintered compact having a low boron content and high density comparable with that of a sintered compact having a high boron content. CONSTITUTION:A boric acid solution regulated so as to provide 0.03-0.15 wt.% boron content in a sintered compact is produced. Fine beta-type silicon powder having about <=0.1mum particle diameter is dispersed in a solvent so as to afford 0.1-10wt.% beta-type silicon carbide content in the sintered compact to produce a slurry. A slurry prepared by dispersing fine (alpha-type silicon powder which is a main raw material in a solvent and a slurry obtained by dispersing a carbon source in a solvent are produced. The boric acid solution and the respective slurries are kneaded to afford a slip, which is formed and burned. Thereby, a silicon carbide sintered compact having a low boron content and a high density comparable with that of a sintered compact having a high boron content is obtained.