| 摘要 |
PCT No. PCT/JP93/01661 Sec. 371 Date Sep. 19, 1994 Sec. 102(e) Date Sep. 19, 1994 PCT Filed Nov. 12, 1993 PCT Pub. No. WO94/11899 PCT Pub. Date May 26, 1994.A reduction in the air tightness of a reaction chamber of an apparatus due to thermal degradation of a vacuum seal at the connection seal between the reaction chamber and a manifold is prevented. Contamination of the inside of the chamber from particles produced from heating members of the apparatus is reduced. The wall of the reaction chamber extends to a location sufficiently spaced from the lower end of the heater surrounding the reaction chamber. An exhaust port is provided in the wall to exhaust the reaction chamber.
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