| 摘要 |
PROBLEM TO BE SOLVED: To provide tool cleaning method and device capable of surely preventing loading of a fixed abrasive grain wire tool and excessive abrasion of the tool, thereby realizing long life of the tool. SOLUTION: When a work piece 24 such as a silicon ingot is machined by cut, roll brushes 30a, 30b with brush bristle spirally arranged on outer peripheries of the rolls are applied to a running fixed abrasive grain wire tool 20, and while the brushes are rotating, a cleaning liquid 31 such as alcohol is supplied to a wire surface. By bringing the brush bristle portion into continuous contact with the wire tool surface, cleaning performance is improved by suppressing transverse vibration of the wire, and dirt such as chips adhered/ deposited on the wire surface due to cutting is surely cleaned by using both of brush cleaning and liquid cleaning. |
