| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet for a polishing pad capable of sufficiently suppressing occurrence of scratches on a polishing object.SOLUTION: A resin sheet for a polishing pad includes a resin sheet including a foam resin area with a plurality of foams, and a skin layer area integrally and inseparably formed on the foam resin area. In the sheet, the skin layer area is curved and/or bent in a thickness direction of the resin sheet, and thereby grooves are formed on a skin layer area side in the thickness direction of the resin sheet. |
