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发明名称
Sensing system
摘要
A ChemFET Sensing system is Described.
申请公布号
US2007099351(A1)
申请公布日期
2007.05.03
申请号
US20050263788
申请日期
2005.10.31
申请人
PETERS KEVIN F;YANG XIAOFENG
发明人
PETERS KEVIN F.;YANG XIAOFENG
分类号
H01L21/8232;H01L21/335
主分类号
H01L21/8232
代理机构
代理人
主权项
地址
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