发明名称 |
Method for fabricating a thin film capacitor |
摘要 |
A method is provided for the manufacture of precision electronic components such as resistors, inductors, and capacitors on a polymer or ceramic surface. The electronic components can be deposited and trimmed to precise or matched values without having precise depositions of all of the pre-patterned materials. Thin film electronic components are deposited on a surface, parameter values are measured or estimated, a correction offset file is generated, and the components are trimmed using adaptive lithography to a very close tolerance. A computer program can be used to enable the adjustment of electronic components by techniques such as changing the physical length of an inductor coil or resistor lead, or by changing a capacitor plate area.
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申请公布号 |
US5872040(A) |
申请公布日期 |
1999.02.16 |
申请号 |
US19970862994 |
申请日期 |
1997.05.27 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WOJNAROWSKI, ROBERT JOHN;ROSE, JAMES WILSON;BALCH, ERNEST WAYNE;DOUGLAS, LEONARD RICHARD;DOWNEY, EVAN TAYLOR;GDULA, MICHAEL |
分类号 |
H01C17/12;H01C17/24;H01G4/06;H01G4/08;H05K1/16;(IPC1-7):H01L21/20 |
主分类号 |
H01C17/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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