| 摘要 |
<p>A force sensor, such as it can be used in a scale, consists of two glass plates (1, 2) with springs (3) arranged there between. An electrode (5, 6) is arranged on each glass plate (1, 2) and the capacity between the electrodes is measured. The springs (3) are silicon single crystals, which avoids fatigue and stress and therefore provides a drift-free sensor. <IMAGE></p> |
