| 发明名称 |
TEMPLATE FORMING METHOD, TEMPLATE, AND TEMPLATE BASE MATERIAL |
| 摘要 |
According to one embodiment, a template forming method is provided. In the template forming method, a template pattern is formed on a first surface of a substrate. A high liquid repellent property portion is formed in a region different from the template pattern on a side of the first surface of the substrate. The high liquid repellent property portion has a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein. |
| 申请公布号 |
US2016247673(A1) |
申请公布日期 |
2016.08.25 |
| 申请号 |
US201514844050 |
申请日期 |
2015.09.03 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TSUJI Masatoshi;HATANO Masayuki;KOMATSU Yohko;NAKASUGI Tetsuro |
| 分类号 |
H01L21/027;C23F1/16 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A template forming method comprising:
forming a template pattern on a first surface of a substrate; and forming a high liquid repellent property portion in a region different from the template pattern on a side of the first surface of the substrate, the high liquid repellent property portion having a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein. |
| 地址 |
Tokyo JP |
