发明名称 APPARATUS FOR ABSORBING SEMICONDUCTOR SUBSTRATE HORIZONTAL BY VACUUM
摘要 PURPOSE: An apparatus for absorbing a semiconductor substrate horizontal by vacuum is provided to increase vacuum absorption regarding a printed circuit board, by operating a stopper to press an upper surface of the printed circuit board while operating a cylinder to elevate a lifting material, so that the printed circuit board is unfolded while absorbed by vacuum. CONSTITUTION: The apparatus comprises a substrate fixing unit, a lifting material operating unit and a stopping unit(90). The substrate fixing unit is established in a lifting material(20) and inserted into a plurality of positions of the semiconductor substrate for fixing the positions. The lifting material operating unit is fixedly established on a bottom surface of a main plate and moves up and down the lifting material. The stopping unit presses a plurality of positions of the semiconductor substrate moving up by the lifting material operating unit and makes the semiconductor substrate become flat.
申请公布号 KR20010009073(A) 申请公布日期 2001.02.05
申请号 KR19990027238 申请日期 1999.07.07
申请人 POONG SAN TECH CO., LTD. 发明人 KIM, JONG BAE
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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