| 摘要 |
<p>Provided according to the present invention is a hard carbon film having both of excellent wear resistance and high conductivity. Also provided is a hard carbon film having small internal stress, which can sufficiently maintain excellent slidability. An amorphous hard carbon film which is mainly composed of carbon, or carbon and hydrogen, and contains at least one impurity element other than carbon and hydrogen has electrical resistivity of at least 1 x 10<-><6> OMEGA .cm and not more than 1 x 10<2> OMEGA .cm at the room temperature. An amorphous hard carbon film which is mainly composed of carbon, or carbon and hydrogen, and contains at least one impurity element other than carbon and hydrogen contains the impurity element other than carbon and hydrogen in concentration of at least 0.001 atomic percent and not more than 40 atomic percent, and has internal stress of at least 1 x 10<8> dyne/cm<2> and not more than 7 x 10<9> dyne/cm<2>.</p> |
