| 摘要 |
A patterned TDI sensor comprising an array of pixels having respective sensitivities to light that varies according to a periodic pattern across said array of pixels, for high throughput applications of imaging and measurement with patterned illumination such as structured illumination, Moire techniques, 3D imaging and 3D metrology. An object is measured by scanning the object with illumination that varies periodically across the object, imaging the object with a patterned TDI sensor having a repetition length matched with the repetition length of the illumination and analyzing the output signal of the TDI sensor to extract information such as height or image of the object. |
