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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH03239348(A)
申请公布日期
1991.10.24
申请号
JP19900037101
申请日期
1990.02.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUKAMOTO KAZUHIRO
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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