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经营范围
发明名称
PETCH ARM MOUNT OF SEMICONDUCTOR WAFER
摘要
申请公布号
KR0161622(B1)
申请公布日期
1999.02.01
申请号
KR19950032521
申请日期
1995.09.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, SUK-WOO;KIM, SUNG-ILL;LEE, SANG-HUN
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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