MASS TRANSFER TOOL MANIPULATOR ASSEMBLY

摘要

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.

主权项

1. A method comprising:
moving a mass transfer tool manipulator assembly toward a carrier substrate; contacting an array of micro devices on the carrier substrate with an array of electrostatic transfer heads coupled with a pivot platform of the mass transfer tool manipulator assembly; sensing deformation of a compliant element coupled with the pivot platform; stopping relative movement between the mass transfer tool manipulator assembly and the carrier substrate; applying a voltage to the array of electrostatic transfer heads to create a grip pressure on the array of micro devices; and picking up the array of micro devices from the carrier substrate.