BOAT FOR SUPPORTING OBJECT TO BE PROCESSED

摘要

PURPOSE: To provide a boat for supporting an object to be processed in which the thermal history of object in the vicinity of upper end can be equalized to that at other part. CONSTITUTION: The boat for supporting an object to be processed comprises a multi-stage supporting shelf 48 for mounting a plurality of objects to be heat- treated in a vertical heat-treatment system, supports 50A-50D for holding the supporting shelf while coupling vertically, and a heat ray shade 52 disposed above the uppermost supporting shelf. The shade suppresses abrupt heating in the center of object located in the vicinity of upper end of the supporting shelf and substantially equalizing the thermal history of all objects.