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发明名称
摘要
申请公布号
JP2795252(B2)
申请公布日期
1998.09.10
申请号
JP19960043311
申请日期
1996.02.29
申请人
NIPPON DENKI KK
发明人
SAKO TAKASHI
分类号
H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L21/824
主分类号
H01L27/04
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代理人
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