| 摘要 |
PROBLEM TO BE SOLVED: To provide a compensation method of dark current for light energy value without affecting throughput of manufacturing system. SOLUTION: This compensation method comprises a step (a) of calculating a 1st dark current value from both 1st and 2nd arrays of a photosensitive device, a step (b) of receiving light energy through the 1st array, a step (c) of calculating light energy value for each element of the 1st array based on the received light energy, a step (d) of calculating a 2nd dark current value from the 2nd array insensitive to light energy at about the same time as the step (c), and a step (e) to adjust the light energy value as a function of both 1st and 2nd dark current values. COPYRIGHT: (C)2005,JPO&NCIPI
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