| 摘要 |
<p>PURPOSE:To align the giving and receiving position simply and accurately when a wafer is given and received between a wafer chuck for holding the wafer and a wafer holding toll tool for holding the wafer in a cleaning tank. CONSTITUTION:The images of a holding groove P1 of a holding rod on the side of a wafer chuck and a holding groove Q1 of a holding rod 43 on the side of a wafer holding tool 41 are picked up with an image pickup device 55. The respective images of the holding groove P1 and the holding groove Q1 are displayed on the same coordinate system in the screen of the same monitor. When the positions are deviated, the images are deviated and displayed on the same screen. Therefore, when the wafer chuck is adjusted so that both images agree, the positions can be aligned simply and accurately.</p> |
