| 摘要 |
PROBLEM TO BE SOLVED: To visually inspect a large-sized substrate by irradiating it with an illumination light from a compact illumination optical system. SOLUTION: A light projector is provided with an illumination system body 1 for irradiating a glass substrate supported on an observation system body with a macro illumination light. The illumination system body 1 reflects an illumination light from the macro illumination light source 2 by the first reflecting mirror 3 and the second reflecting mirror 4, and converges reflected light by a Fresnel lens 5 to irradiate the glass substrate. The illumination system body 1 is supported swingably onto a swinging shaft 31 provided in a moving frame 24 of a moving unit 21. The illumination system body 1 is swung around the swinging shaft 31 by a swinging unit 30 to swing the macro illumination light for irradiating the glass substrate. The illumination system body 1 is moved along a longitudinal direction together with the swinging shaft 31 by the moving unit 21. The illumination light is scanned along two directions substantially orthogonal each other, on the glass substrate. COPYRIGHT: (C)2008,JPO&INPIT
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