| 摘要 |
PURPOSE:To constitute a single plate type X-Y table device into a structure, wherein a work-table to be placed with a substrate or the like is directly driven in X-Y directions, to form the table of the device using one sheet of the work- table only to contrive lightening, to realize the significant speedup of the plane movement of the device in the X-Y directions and at the same time, to contrive a reduction in the vibration of the device and the improvement of the accuracy of the device. CONSTITUTION:A single plate type X-Y table device is provided with Y-axis direction work-table guide parts 2A and 2B fixed on a base 1, orthogonal guide blocks 3 supported slidingly in a Y-axis direction by the guide parts 2A and 2B, X-axis direction guide rails 5A and 5B supported slidingly in an X-axis direction by the blocks 3 and a worktable 4 fixed on the rails 5A and 5B. Accordingly, the work-table 4 is driven in the X-axis direction by an X-axis drive source and an X-axis drive transfer part and at the same time, is driven in the Y-axis direction by a Y-axis drive source and a Y-axis drive transfer part. |
