METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATION CHIP

摘要

PROBLEM TO BE SOLVED: To solve a problem of a conventional manufacturing method that a number of manufacturing steps are required for a piezoelectric vibration chip because two drive side electrodes for the vibration chip and a single detection side electrode for a detection chip cannot be simultaneously formed. SOLUTION: A piezoelectric substrate is formed with a through-hole having a hollow part, and the formation of a metal film in the through-hole and the division of the piezoelectric substrate at a desired part are performed in the same step. COPYRIGHT: (C)2005,JPO&NCIPI