发明名称 光学式位置測定装置
摘要 The optical position measuring device has a material measure (10) which is connected with one of the two objects and has an incremental line (12) extended in measuring direction (x) and a reference marking (11) at a reference position (x-REF). A scanning unit is connected with the other of the both objects and has a divergent radiated light source, one or multiple grids and a reference signal-detector arrangement. The reference signal-detector arrangement has four detector arrays with multiple detector elements.
申请公布号 JP6054059(B2) 申请公布日期 2016.12.27
申请号 JP20120113454 申请日期 2012.05.17
申请人 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG 发明人 ミヒャエル・ヘルマン
分类号 G01D5/347;G01D5/38 主分类号 G01D5/347
代理机构 代理人
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