| 摘要 |
<p>PROBLEM TO BE SOLVED: To ensure the reliability of electric terminals for applying a voltage to electrodes by embedding the electric terminals electrically insulated from a first electrode in a through-hole at a recess of an Al head, connecting the electrical terminal to a second electrode, and forming a dielectric film on the surfaces of the first and second electrodes. SOLUTION: An insulator 21 is provided on a screw-fixed grounding board 20 in a vacuum chamber, a lower electrode is provided on the top of the insulator 21, an Al head 24 is mounted on its surface, a circular groove 31 is provided as a recess at the Al head 24, a through-hole 32 is bored through one spot of the groove 31, an insulator 33 is embedded in the through-hole 32, a second electrode 35 is embedded in the insulator 33 so as to project from the bottom of the groove 31 and electrically connected to an electrical terminal 29, an insulation film 34 is provided in the groove 31, a first electrode 30 is formed on its surface, and a dielectric film 23 is formed on the surfaces of the first and second electrodes 30, 35 through the melt spraying.</p> |
