发明名称 |
Displacement element, cantilever probe and information processing apparatus using cantilever probe |
摘要 |
A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material.
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申请公布号 |
US5396066(A) |
申请公布日期 |
1995.03.07 |
申请号 |
US19940253609 |
申请日期 |
1994.06.03 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
IKEDA, TSUTOMU;YAMAMOTO, KEISUKE;NAKAYAMA, MASARU;YAGI, TAKAYUKI;KAWADA, HARUKI |
分类号 |
G01Q70/08;G01B21/30;G01N27/00;G01Q60/16;G01Q70/06;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L29/84;H01L41/09;(IPC1-7):H01J37/28 |
主分类号 |
G01Q70/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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