| 摘要 |
PROBLEM TO BE SOLVED: To inspect an excimer laser easily and in a short time by a method wherein a spacer used to insert an inspection apparatus which inspects the performance of the excimer laser is formed inside the enclosure of the excimer laser. SOLUTION: A space 30 used to insert an inspection apparatus 18 is formed between a first permanent monitor part 14 and an enclosure 17 at an excimer laser 16. In a usual laser oscillation, an internal duct 33 is installed at the space 30. In a maintenance operation, the internal duct 33 is removed. The inspection apparatus 18 is inserted into the space 30 so as to inspect the excimer laser 16. Since the internal duct 33 is not provided with mirrors 24, for optical-axis adjustment, at the inside as different from an external duct 20, an optical axis is not deviated even when the internal duct 33 is removed. The inspection apparatus 18 which is positioned inside the enclosure 17 measures, by using a wavelength detector, the wavelength characteristic of laser light 3 which is transmitted and reflected inside a beam cutting unit, and whether the laser light is suitable as a light source for a stepper 22 is inspected. When the space 30 is formed in this manner, the inspection of the excimeter laser 16 can be performed easily and in a short time without removing the external duct 20. |
