发明名称 Semiconductor device having dual stacked MIM capacitor and method of fabricating the same
摘要 Semiconductor devices having a dual stacked MIM capacitor and methods of fabricating the same are disclosed. The semiconductor device includes a dual stacked MIM capacitor formed on the semiconductor substrate. The dual stacked MIM capacitor includes a lower plate positioned, an upper plate electrically connected to the lower plate and positioned above the lower plate, and an intermediate plate interposed between the lower plate and the upper plate. An upper interconnection line is positioned at the same level as the upper plate. The upper interconnection line is electrically connected to the intermediate plate. As a result, the upper plate may be formed by a damascene process.
申请公布号 US2005167722(A1) 申请公布日期 2005.08.04
申请号 US20050047817 申请日期 2005.02.02
申请人 WON SEOK-JUN 发明人 WON SEOK-JUN
分类号 H01L27/108;H01L21/02;H01L27/08;H01L29/76;H01L29/94;H01L31/119;(IPC1-7):H01L29/76 主分类号 H01L27/108
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