发明名称 |
Package Structure and Methods of Forming Same |
摘要 |
A semiconductor device, a package structure, and methods of forming the same are disclosed. An embodiment is a semiconductor device comprising a first optical device over a first substrate, a vertical waveguide on a top surface of the first optical device, and a second substrate over the vertical waveguide. The semiconductor device further comprises a lens capping layer on a top surface of the second substrate, wherein the lens capping layer is aligned with the vertical waveguide, and a second optical device over the lens capping layer. |
申请公布号 |
US2016245998(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
US201615144294 |
申请日期 |
2016.05.02 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Lai Jui Hsieh;Kuo Ying-Hao;Chen Hai-Ching;Bao Tien-I |
分类号 |
G02B6/12;H01S5/026;H01S5/022;G02B6/122;G02B6/42 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
|
主权项 |
1. A device comprising:
a first optical device on a first side of a first substrate; a vertical waveguide on a top surface of the first optical device; a second substrate bonded to the first side of the first substrate, the second substrate being over the vertical waveguide; and a lens capping layer on the second substrate, a portion of the second substrate being directly between the vertical waveguide and the lens capping layer. |
地址 |
Hsin-Chu TW |