发明名称 Package Structure and Methods of Forming Same
摘要 A semiconductor device, a package structure, and methods of forming the same are disclosed. An embodiment is a semiconductor device comprising a first optical device over a first substrate, a vertical waveguide on a top surface of the first optical device, and a second substrate over the vertical waveguide. The semiconductor device further comprises a lens capping layer on a top surface of the second substrate, wherein the lens capping layer is aligned with the vertical waveguide, and a second optical device over the lens capping layer.
申请公布号 US2016245998(A1) 申请公布日期 2016.08.25
申请号 US201615144294 申请日期 2016.05.02
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lai Jui Hsieh;Kuo Ying-Hao;Chen Hai-Ching;Bao Tien-I
分类号 G02B6/12;H01S5/026;H01S5/022;G02B6/122;G02B6/42 主分类号 G02B6/12
代理机构 代理人
主权项 1. A device comprising: a first optical device on a first side of a first substrate; a vertical waveguide on a top surface of the first optical device; a second substrate bonded to the first side of the first substrate, the second substrate being over the vertical waveguide; and a lens capping layer on the second substrate, a portion of the second substrate being directly between the vertical waveguide and the lens capping layer.
地址 Hsin-Chu TW