发明名称 |
Semiconductor apparatus and manufacturing method of the same |
摘要 |
A semiconductor apparatus comprises a first semiconductor device and a second semiconductor device. The first semiconductor device includes: a semiconductor layer having a p-type channel area; an n-type source area, and an n-type drain area; a first gate insulating film provided on the p-type channel area; and a first gate electrode provided on the first gate insulating film containing a first metallic element and nitrogen. The second semiconductor device includes: a semiconductor layer having an n-type channel area, a p-type source area, and a p-type drain area; a second gate insulating film provided on the n-type channel area; and a second gate electrode provided on the second gate insulating film containing a second metallic element and nitrogen. A nitrogen content of the second gate electrode is higher than a nitrogen content of the first gate electrode.
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申请公布号 |
US2005167767(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20050043962 |
申请日期 |
2005.01.28 |
申请人 |
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES , INC. |
发明人 |
AKASAKA YASUSHI |
分类号 |
H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/423;H01L29/45;H01L29/49;H01L29/51;H01L29/78;(IPC1-7):H01L29/45 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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