| 摘要 |
PURPOSE:To provide a sintered aluminum nitride having stabilized light-shielding property and heat-conductivity. CONSTITUTION:The objective sintered aluminum nitride is composed mainly of aluminum nitride and contains 0.05-10.0wt.% (in terms of titanium) of a Ti-N-0-type titanium compound. The titanium compound contains a compound expressed by chemical formula TiNxOy [0<x<1; y=3/2-(1-x)]. The titanium compound is added to aluminum nitride powder at the above ratio and the mixture is formed. The formed product is heated in nitrogen atmosphere, etc., until the residual carbon content is decreased to <=0.9 pts.wt. based on 1 pt.wt. of oxygen in the aluminum nitride powder. Finally, the formed product is sintered in a nitrogen-containing atmosphere. |
